Ultrasonic vibration millgrinding of singlecrystal ...
Feb 15, 2018· Ultrasonic vibration millgrinding of singlecrystal silicon carbide for pressure sensor diaphragms. ... which is fixed to the transducer holder at its nodal point of vibration and mounted on the machine table. As shown in Fig. 2, a grinding wheel is mounted onto the motor spindle, and a square 6HSiC workpiece with a side length of 6 mm and a ...